Saowiang, N., Pasaja, N. and Poolcharuansin*, P. 2022. Energy Distribution Functions of Ions Generated by a Circular-type Anode Layer Ion Source. CURRENT APPLIED SCIENCE AND TECHNOLOGY. 23, 1 (Jun. 2022), DOI: 10.55003/cast.2022.01.23.008 (11 pages). DOI:https://doi.org/10.55003/cast.2022.01.23.008.