Effect of Oxygen Plasma on Tin Oxide Nanorods Prepared by GLAD Technique
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Abstract
In this work, the effect of oxygen plasma with varing plasma power from 100 W to 300 W on tin oxide (SnO2) nanorods prepared by glancing angle deposition (GLAD) technique was studied. The crystal structures were characterized by X-ray diffraction (XRD) technique and the morphology was characterized by field-emission scanning electron microscopy (FE-SEM) technique. Atomic-force microscopy (AFM) revealed that the as-deposited and oxygen plasma-treated tin oxide nanorod structures had orthorhombic phase of SnO2. The degree of crystallinity tended to improve as the plasma power increasd from 100 W to 300 W In addition, the surface roughness of tin oxide nanorods increased with oxygen plasma power increasing. However, the thickness decreased with oxygen plasma power increasing.
Keywords: Oxygen plasma, tin oxide nanorods, GLAD technique
*Corresponding author:
E-mail: Chaiyan.Oro@rmutr.ac.th
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References
[2] Wang, B., Zhu, L.F., Yang, Y.H., Xu, N.S. and Yang, G.W., 2008. Fabrication of a SnO2 nanowire gas sensor and sensor performance for hydrogen. J. Phys. Chem. C, 112(17), 6643–6647.
[3] Sharma, A., Tomar, M. and Gupta, V., 2011. SnO2 thin film sensor with enhanced responsefor NO2 gas at lower temperatures. Sens. Actuators B: Chem., 156(2) 743–752.
[4] Deniz, D., Frankel, D. J. and Lad, R. J., 2010. Nanostructured tungsten and tungsten trioxide films prepared by glancing angle deposition. Thin Solid Films, 518, 4095–4099.
[5] LaForge, J. M., Taschuk, M.T. and Brett, M.J., 2011. Glancing angle deposition of crystalline zinc oxide nanorods. Thin Solid Films, 519, 3530–3537.
[6] Horprathuma, M., Limwicheana, K., Wisitsoraatb, A., Eiamchaia, P., Aiempanakitc, K., Limnonthakuld, P., Nuntawonga, N., Pattantsetakula, V., Tuantranontb, A. and Chindaudom, P., 2013. NO2-sensing properties of WO3 nanorods prepared by glancing angle DC magnetron sputtering. Sensors and Actuators B, 176, 685–691.
[7] Gwon, H.J., Moon, H.G., Jang, H.W., Yoon, S.J. and Yoo, K.S., 2013. Sensitivity enhancementof nanostructured SnO2 gas sensors fabricated using the glancing angledeposition method. J. Nanosci. Nanotechnol., 13(4), 2740–2744.
[8] Oros, C., Horprathum, M., Wisitsoraat, A., Srichaiyaperk, T., Samransuksamer, B., Limwichean, S., Eiamchai, P., Phokharatkul, D., Nuntawong, N., Chananonnawathorn, C., Patthanasettakul, V., Klamchuen, A., Kaewkhao, J., Tuantranont, A. and Chindaudom, P., 2016. Ultra-sensitive NO2 sensor based on vertically aligned SnO2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique. Sensors and Actuators B, 223, 936–945.
[9] Du, H., Wang, J., Sun, Y., Yao, P., Li, X. and Yu, N., 2015. Investigation of gas sensing properties of SnO2/In2O3 composite hetero-nanofibers treated by oxygen plasma. Sensors and Actuators B, 206, 753–763.
[10] Cullity, B.D. and Stock, S.R., 2001. Elements of X-ray Diffraction. 3rd edn. (Prentice Hall, New Jersey), p. 388.
