Laser Diode Self-mixing Technique for Optical Metrology Apllications

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Published: Mar 30, 2018
Keywords:
self-mixing interference, optical metrology

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S. Ratchanee
Metrology Engineering Program, Faculty of Engineering, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand.
P.P Yupapin
Lightwave Technology Research Center (LTRC), Department of Applied Physics, Faculty of Science, King Mongkut’s Institute of Technology Ladkrabang, Bangkok, Thailand.
W. Jewpraditkul
Metrology Engineering Program, Faculty of Engineering, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand.

Abstract

This paper proposed a technique for the distance or displacement measurement, based on the optical interferometer known as self-mixing interference. The principle of system is the light from the laser diode is launched into a tested sample, then the reflected light is allowed to re-enter the laser cavity and detected by its own photodiode. The result is analyzed by mathematical relationship between the feedback signal from photodiode and the displacement, give the calibration equation. With the advantage of adjustable beam size and non-contact measurement of this technique, it is properly to develop for measurement the deepness hole with small cross-section.


Keywords:  self-mixing interference, optical metrology


Corresponding author: E-mail: cast@kmitl.ac.th

Article Details

Issue
Vol. 1 No. 1 (2001)
Section
Original Research Articles

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