Laser Diode Self-mixing Technique for Optical Metrology Apllications

Main Article Content

S. Ratchanee
P.P Yupapin
W. Jewpraditkul

Abstract

This paper proposed a technique for the distance or displacement measurement, based on the optical interferometer known as self-mixing interference. The principle of system is the light from the laser diode is launched into a tested sample, then the reflected light is allowed to re-enter the laser cavity and detected by its own photodiode. The result is analyzed by mathematical relationship between the feedback signal from photodiode and the displacement, give the calibration equation. With the advantage of adjustable beam size and non-contact measurement of this technique, it is properly to develop for measurement the deepness hole with small cross-section.


Keywords:  self-mixing interference, optical metrology


Corresponding author: E-mail: cast@kmitl.ac.th

Article Details

Section
Original Research Articles

References

[1] W.M. Wang, K.T.V. Grattan, A.W. Palmer and W.J.O. Boyle, “Self-mixing Interference Inside a Single Mode Diode Laser for Optical Sensing Applications”, J. Lightwave Technol., Vol.12, No.9, pp.1577-1587 (September 1994).
[2] T. Suzuki, S. Hirabayashi, O. Sasaki and T. Maruyama, “Self-mixing Type of Phase-locked Laser Diode Interferometer”, Opt. Eng., Vol. 38, No.3, pp. 543-548 (March 1999).
[3] T. Yoshino, M. Nara, Sergay Mnatzakanian, Byron S. Lee and Timothy C. Strand, “Laser Diode Feedback Interferometer for Stabilization and Displacement Measurements”, Appl. Phys., Vol. 26, No.5, pp.892-897 (March 1987).
[4] E. Gagnon, J-F Rivest “Laser Range Imaging using Self-mixing Effect in a Laser Diode”, IEEE Trans. Instrum. Meas., Vol. 48, No. 3, pp. 693-699 (June 1999).
[5] R. Lang and K. Kobayashi, “External Optical Feedback Effect on Semiconductor Injection Laser Properties”, J. Quantum Elec., Vol. QE-16, No. 3, pp. 347-355 (March 1980).
[6] T. Bosch, N. Servagent, S. Donati, “Optical Feedback Interferometry for Sensing Application”, Opt. Eng., Vol.40, No.1, pp. 20-27 (January 2001).
[7] H.W. Jentink, F.F.M. de Mul, H.E. Suichies, J.G. Aarnoudse and J. Greve, “Small laser Doppler Velocimeter Based on the Self-mixing Effect in Diode Laser”, Appl. Phys., Vol. 27, No. 2, pp. 379-385 (January 1988).
[8] Hirochi Kakiuchida and Junji Ohtsubo, “Characteristic of Semiconductor Laser with External Feedback”, IEEE J. Quantum Electron., Vol.30, No.9, pp.2087-2097 (September 1994).