Effects of Sputtering Power and Gamma Radiation Dose on the Optical and Electrical Properties of ITO Films
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Abstract
ITO films were deposited on glass substrates using DC magnetron sputtering at different sputtering powers of 10 and 20 W. All films were irradiated with gamma radiation at doses ranging from 0 to 150 kGy. XRD results showed that ITO films at 10 W sputtering power exhibited decreased crystallinity with increasing gamma doses, while films at 20 W showed higher crystallinity at 50 kGy, which then decreased with further irradiation. The optical transmittance and energy band gap decreased with increasing doses, indicating structural changes due to defect formation. The electrical resistivity of the ITO film increased with the irradiated dose for a sputtering power of 10 and 20 W due to the increased defect formation in the structure. Even though the sputtering power condition was 20 W, after irradiation with a dose of 50 kGy, the ITO film exhibited higher crystallinity but had a predominant change in the (222) plane instead of the (400) plane. This study revealed the important role of deposition parameters and gamma irradiation in controlling structural, optical, and electrical properties of ITO films. The reduced resulting energy band gap is linked to increased resistance in ITO films after exposure to gamma radiation, with defect formation.
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References
Aiempanakit, K., Rakkwamsuk, P., & Dumrongrattana, S. (2009). Influence of continuous and discontinuous depositions on properties of ITO films prepared by DC magnetron sputtering. Modern Physics Letters B, 23(26), 3157-3170. https://doi.org/10.1142/s0217984909021211
Al-Baradi, A. M., El-Nahass, M. M., El-Raheem, M. M. A., Atta, A. A., & Hassanien, A. M. (2014). Effect of gamma irradiation on structural and optical properties of Cd₂SnO₄ thin films deposited by DC sputtering technique. Radiation Physics and Chemistry, 103, 227-233. https://doi.org/10.1016/j.radphyschem.2014.05.055
Aldawood, S., & Ali, S. M. (2024). Effects of gamma irradiation on the properties of Ce2S3 thin films. Journal of King Saud University - Science, 36(2), Article 103075. https://doi.org/10.1016/j.jksus.2023.103075
Al-Hardan, N. H., Abdullah, M. J., & Aziz, A. A. (2013). Performance of Cr-doped ZnO for acetone sensing. Applied Surface Science, 270, 480-485. https://doi.org/10.1016/j.apsusc.2013.01.064
Alyamani, A., & Mustapha, N. (2016). Effects of high dose gamma irradiation on ITO thin film properties. Thin Solid Films, 611, 27-32. https://doi.org/10.1016/j.tsf.2016.05.022
Chauhan, R. N., Anand, R. S., & Kumar, J. (2014). RF-sputtered Al-doped ZnO thin films: Optoelectrical properties and application in photovoltaic devices. Physica Status Solidi (a), 211(11), 2514-2522. https://doi.org/10.1002/pssa.201431107
Comini, E., Baratto, C., Concina, I., Faglia, G., Falasconi, M., Ferroni, M., Galstyan, V., Gobbi, E., Ponzoni, A., Vomiero, A., Zappa, D., Sberveglieri, V., & Sberveglieri, G. (2013). Metal oxide nanoscience and nanotechnology for chemical sensors. Sensors and Actuators B: Chemical, 179, 3-20. https://doi.org/10.1016/j.snb.2012.10.027
Coutts, T. J., Young, D. L., Li, X., Mulligan, W. P., & Wu, X. (2000). Search for improved transparent conducting oxides: A fundamental investigation of CdO, Cd₂SnO₄, and Zn₂SnO₄. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 18(6), 2646-2660. https://doi.org/10.1116/1.1290371
Deng, Q., Yin, Z., & Zhu, R. (1999). Radiation-induced color centers in La-doped PbWO₄ crystals. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 438(2-3), 415-420. https://doi.org/10.1016/s0168-9002(99)00835-9
Diliegros-Godines, C. J., Flores-Ruiz, F. J., Castanedo-Pérez, R., Torres-Delgado, G., Espinoza-Beltrán, F. J., & Broitman, E. (2014). Mechanical and tribological properties of CdO + SnO2 thin films prepared by sol–gel. Journal of Sol-Gel Science and Technology, 74(1), 114-120. https://doi.org/10.1007/s10971-014-3584-1
El-Nahass, M. M., Atta, A. A., El-Shazly, E. A. A., Faidah, A. S., & Hendi, A. A. (2009). Influence of γ-irradiation on the optical properties of nanocrystalline tin phthalocyanine thin films. Materials Chemistry and Physics, 117(2-3), 390-394. https://doi.org/10.1016/j.matchemphys.2009.06.015
El-Nahass, M. M., El-Deeb, A. F., Metwally, H. S., El-Sayed, H. E. A., & Hassanien, A. M. (2010). Influence of X-ray irradiation on the optical properties of iron (III) chloride tetraphenylporphyrin thin films. Solid State Sciences, 12(4), 552-557. https://doi.org/10.1016/j.solidstatesciences.2010.01.004
Joseph, S., & Balasundaram, O. N. (2017). Effect of gamma radiation on structural, optical and electrical properties of ZnO thin films. Optoelectronics and Advanced Materials – Rapid Communications, 11(5-6), 377-380.
Kajal, R., Kataria, B. R., Asokan, K., & Mohan, D. (2023). Effects of gamma radiation on structural, optical, and electrical properties of SnO₂ thin films. Applied Surface Science Advances, 15, Article 100406. https://doi.org/10.1016/j.apsadv.2023.100406
Kakil, S. A., Sabr, B. N., Hana, L. S., Abbas, T. A.-H., & Hussin, S. Y. (2018). Effects of a low dose of gamma radiation on the morphology, and the optical and the electrical properties of an ITO thin film as an electrode for solar cell applications. Journal of the Korean Physical Society, 72(5), 561-569.
Khodorov, A., Piechowiak, M., & Gomes, M. J. M. (2007). Structural, electrical and optical properties of indium–tin–oxide thin films prepared by pulsed laser deposition. Thin Solid Films, 515(20-21), 7829-7833. https://doi.org/10.1016/j.tsf.2007.04.017
Kim, S. I., Lee, K. W., Sahu, B. B., & Han, J. G. (2015). Flexible OLED fabrication with ITO thin film on polymer substrate. Japanese Journal of Applied Physics, 54(9), Article 090301. https://doi.org/10.7567/jjap.54.090301
Kulkarni, A. K., Schulz, K. H., Lim, T.-S., & Khan, M. (1997). Electrical, optical and structural characteristics of indium-tin-oxide thin films deposited on glass and polymer substrates. Thin Solid Films, 308-309, 1-7. https://doi.org/10.1016/s0040-6090(97)00526-9
Kumaravel, R., Gokulakrishnan, V., Ramamurthi, K., Sulania, I., Kanjilal, D., Asokan, K., & Avasthi, D. K. (2010). Effect of swift heavy ion irradiation on structural, optical and electrical properties of Cd2SnO4 thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(15), 2391-2394. https://doi.org/10.1016/j.nimb.2010.04.029
Li, X., Gessert, T. A., & Coutts, T. (2004). The properties of cadmium tin oxide thin-film compounds prepared by linear combinatorial synthesis. Applied Surface Science, 223(1-3), 138-143. https://doi.org/10.1016/s0169-4332(03)00909-7
Maknys, K., Ulyashin, A. G., Stiebig, H., Kuznetsov, A. Yu., & Svensson, B. G. (2006). Analysis of ITO thin layers and interfaces in heterojunction solar cells structures by AFM, SCM and SSRM methods. Thin Solid Films, 511-512, 98-102. https://doi.org/10.1016/j.tsf.2005.12.006
Mukhokosi, E. P., Krupanidhi, S. B., & Nanda, K. K. (2017). Band gap engineering of hexagonal SnSe₂ nanostructured thin films for infra-red photodetection. Scientific Reports, 7(1), Article 15215. https://doi.org/10.1038/s41598-017-15519-x
Mustapha, N., Alkaoud, A., Alyamani, A., & Idriss, H. (2018). Influence of gamma ray onto transparent indium tin oxide thin films. Journal of Ovonic Research, 14(3), 225-233.
Mustapha, N., Ibnaouf, K. H., Fekkai, Z., Hennache, A., Prasad, S., & Alyamani, A. (2013). Improved efficiency of solar cells based on BEHP-co-MEH-PPV doped with ZnO nanoparticles. Optik, 124(22), 5524-5527. https://doi.org/10.1016/j.ijleo.2013.03.161
Oryema, B., Jurua, E., Madiba, I. G., Nkosi, M., Sackey, J., & Maaza, M. (2020). Effects of low-dose γ-irradiation on the structural, morphological, and optical properties of fluorine-doped tin oxide thin films. Radiation Physics and Chemistry, 176, Article 109077. https://doi.org/10.1016/j.radphyschem.2020.109077
Pawar, V., Jha, P. K., Panda, S. K., Jha, P. A., & Singh, P. (2018). Band-gap engineering in ZnO thin films: A combined experimental and theoretical study. Physical Review Applied, 9(5), Article 054001. https://doi.org/10.1103/physrevapplied.9.054001
Rossnagel, S. (2001). Sputtering and sputter deposition. In R. F. Bunshah (Ed.). Handbook of hard coatings: Deposition technologies, properties and applications (pp. 319-348). Elsevier. https://doi.org/10.1016/B978-081551442-8.50013-4
Tahar, R. B. H., Ban, T., Ohya, Y., & Takahashi, Y. (2001). Effect of processing parameters on physical properties of cadmium stannate thin films prepared by a dip‐coating technique. Journal of the American Ceramic Society, 84(1), 85-91. https://doi.org/10.1111/j.1151-2916.2001.tb00612.x
Venkatachalam, S., Nanjo, H., Kawasaki, K., Hayashi, H., Ebina, T., & Mangalaraj, D. (2011). Optoelectronic properties of ZnSe, ITO, TiO₂ and ZnO thin films. InTech. https://doi.org/10.5772/18418
Wohlmuth, W., & Adesida, I. (2005). Properties of R.F. magnetron sputtered cadmium–tin–oxide and indium–tin–oxide thin films. Thin Solid Films, 479(1-2), 223-231. https://doi.org/10.1016/j.tsf.2004.11.186
Wu, X., Mulligan, W. P., & Coutts, T. J. (1996). Recent developments in RF sputtered cadmium stannate films. Thin Solid Films, 286(1-2), 274-276. https://doi.org/10.1016/s0040-6090(95)08527-0
Yan, M., Lane, M., Kannewurf, C. R., & Chang, R. P. H. (2001). Highly conductive epitaxial CdO thin films prepared by pulsed laser deposition. Applied Physics Letters, 78(16), 2342-2344. https://doi.org/10.1063/1.1365410
