Characterization of Indium Tin Oxide Films after Annealing in Vacuum

Authors

  • Kamon Aiempanakit Department of Physics, Faculty of science, King Mongkut’s University of Technology Thonburi, Bangkok 10140, Thailand.
  • Pattana Rakkwamsuk Division of Materials Technology, School of Energy, Environment and Materials, King Mongkut’s University of Technology Thonburi, Bangkok 10140, Thailand.
  • Supattanapong Dumrongrattana Department of Physics, Faculty of science, King Mongkut’s University of Technology Thonburi, Bangkok 10140, Thailand.

Keywords:

ITO film, annealing temperature, dc magnetron sputtering

Abstract

ITO thin films were deposited on glass substrate by dc magnetron sputtering without substrate heating. The effects of annealing in vacuum on the structural, optical and electrical properties were investigated. The samples of 120 nm ITO films were separately annealed at 200, 250, 300 and 350°C for 1 hour. The results showed that the increasing of the annealing temperatures improve the crystallinity of the films, increase the grain sizes and improve their optical and electrical properties. The optical transmission of films in the visible region increase while in the near infrared region decrease with increasing the annealing temperatures. The relative intensities I(400)/I(222) of ITO films increase but the resistivity decrease with increasing the annealing temperature. The prepared ITO film as-deposited has a resistivity of 2.47×10-3 Ω.cm and decreases to 3.95×10-4 Ω.cm after annealing at 350°C for 1 hour and energy gap increases from 3.99 eV to 4.10 eV.

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Published

2008-12-31

How to Cite

Kamon Aiempanakit, Pattana Rakkwamsuk, and Supattanapong Dumrongrattana. 2008. “Characterization of Indium Tin Oxide Films after Annealing in Vacuum”. Agriculture and Natural Resources 42 (5). Bangkok, Thailand:351-56. https://li01.tci-thaijo.org/index.php/anres/article/view/244619.

Issue

Vol. 42 No. 5 (2008): January-December

Section

Research Article

License

online 2452-316X print 2468-1458/Copyright © 2022. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/),
production and hosting by Kasetsart University of Research and Development Institute on behalf of Kasetsart University.